ASML - The Netherlands & Taiwan


Headquartered in Veldhoven, the Netherlands, ASML is one of the world’s leading manufacturers of chip-making equipment. Chips are becoming faster, smaller, smarter, more energy efficient and more affordable. To meet the increasingly demanding requirements of the industry, ASML continuously develops new technologies and machines and so needs to continually expand and upgrade its facilities.

Strategic partner

For more than 25 years, Deerns has worked as ASML’s strategic partner when it comes to planning and designing their new installations and facilities. Following our design of ASML’s first cleanrooms in the early nineties, in 2009  ASML developed a master plan for their campus in Veldhoven in close collaboration with Deerns. The implementation of the master plan started in 2010 and is still in progress. This includes the design and realisation of the new cleanrooms for the development and assembly of the EUV lithography scanners, office spaces above these cleanrooms and a new restaurant. Simultaneously ASML’s existing NXT scanner plant is being upgraded.

ASML Centre of Excellence

Outside the Netherlands, Deerns designed and supervised ASML’s new production and training facility in Taiwan, the ASML Centre of Excellence (ACE), in only eighteen months. The design team was challenged to develop dedicated scrubbing and filtration systems to prevent the risk of Airborne Molecular Contamination. Furthermore, since Taiwan is located in an area where earthquakes, typhoons and cyclones often occur, the ACE building was designed to withstand these severe natural challenges, while providing the strict vibration specifications for ASML’s cleanroom operations.